PlasmaPro 100 Cobra 300 - Fluorine Etcher (Bosch Configuration)
Prepare a clear and concise description of the supplies or services that is not unnecessarily restrictive of competition and will allow a prospective offeror to make an informed business judgment as to whether a copy of the solicitation should be requested. The Federal Acquisition Regulation (FAR) has specific recommendations in Part 5. It is recommended that specific clauses should NOT be included in full, just referenced or attached. The description section does have a character cap (65,535), as it should be brief and include necessary details. Attachments and links can be added as needed for further documentation.
See additional details in: "Plasma Silicon Etcher Specification" document attached.
